Summary

• Provides focused information for supply-chain managers, process integration and R&D directors, as well as business development and financial analysts
• Covers information about key electronic gases suppliers, issues/trends in the electronic gases material supply chain, estimates on supplier market share, and forecast for the electronic gases material segments

Description

This report covers the electronic gas materials market and supply-chain for these materials used in semiconductor device fabrication. One of the challenges that the gas companies encounter is profitability due to the timing of investments and industry downturns for large installations like Air Separation Units (ASUs) and Semiconductor fabs. In the meantime, new suppliers are emerging in the China market to support the “Made in China” program backed by the government. When these suppliers gain in capability and capacity, their influence could dramatically impact the gas supply chain in the next 3+ years.

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Table of Contents

TECHCET-CMR-Gases-CMCF-051723CY

1 EXECUTIVE SUMMARY  13
1.1 ELECTRONIC GAS MARKET – HISTORICAL AND 5-YEAR FORECAST         14
1.2 MARKET DRIVERS FOR THE SPECIALTY GAS MARKET             15
1.2.1 SPECIALTY GAS MARKET: 5-YEAR SUPPLY & DEMAND            16
1.3 MARKET TRENDS                             17
1.4  TECHNOLOGY TRENDS– DEVICE ROADMAP                   21
1.4.1 TECHNOLOGY TRENDS – DEVICE SEGMENT OPPORTUNITIES            22
1.5 COMPETITIVE LANDSCAPE– ELECTRONIC GAS MARKET SHARE             23
1.6 SUPPLY CAPACITY AND DEMAND, INVESTMENTS                 24
1.7 EHS AND LOGISTIC ISSUES– GREEN HOUSE GASES FROM LOGIC PRODUCTION     25
1.8 MARKET ASSESSMENT SUMMARY                         28
2 SCOPE, PURPOSE AND METHODOLOGY  30
2.1 SCOPE                                 31
2.2 PURPOSE                                 32
2.3 METHODOLOGY                             33
2.4 OVERVIEW OF OTHER TECHCET CMR™ REPORTS                 34
3 SEMICONDUCTOR INDUSTRY MARKET STATUS & OUTLOOK 35
3.1 WORLDWIDE ECONOMY                             36
3.1.1  SEMICONDUCTOR INDUSTRIES TIES TO THE GLOBAL ECONOMY         38
3.1.2 SEMICONDUCTOR SALES GROWTH                    39
3.1.3 TAIWAN MONTHLY SALES TRENDS                    40
3.1.4 UNCERTAINTY ABOUNDS ESPECIALLY FOR 2023 - SLOWER TO NEGATIVE SEMICONDUCTOR  REVENUE GROWTH EXPECTED 41
3.2 CHIPS SALES BY ELECTRONIC GOODS SEGMENT                 42
3.2.1 SMARTPHONES                             43
3.2.2 PC UNIT SHIPMENTS                         44
3.2.3  SERVERS / IT MARKET                        47
3.3 SEMICONDUCTOR FABRICATION GROWTH & EXPANSION             48
3.3.1 FAB EXPANSION ANNOUNCEMENT SUMMARY                49
3.3.2 WW FAB EXPANSION DRIVING GROWTH                     51
3.3.3 EQUIPMENT SPENDING TRENDS                        52
3.3.4 TECHNOLOGY ROADMAPS                        53
3.3.5 FAB INVESTMENT ASSESSMENT                        54
3.4 POLICY & TRADE TRENDS AND IMPACT                     55
3.5 SEMICONDUCTOR MATERIALS OVERVIEW                    56
3.5.1 COULD MATERIALS CAPACITY LIMIT CHIP PRODUCTION SCHEDULES?    57
3.5.2 LOGISTICS ISSUES EASED DOWN                     58
3.5.3 TECHCET WAFER STARTS FORECAST THROUGH 2027            59
3.5.4 TECHCET’S MATERIAL FORECAST                    60
4  ELECTRONIC GASES MARKET TRENDS  61
4.1 MARKET TRENDS DRIVING THE ELECTRONIC GAS BUSINESS                62
4.2 SUPPLY CAPACITY AND DEMAND, INVESTMENTS                   64
4.2.1 WF6 DEMAND DRIVERS                          67
4.2.2 WF6 MARKET DEMAND                               68
4.2.3 WF6 MARKET DEMAND– MO ALD IP FILING                  70
4.2.4 WF6 MARKET DEMAND                               71
4.3 TECHNICAL DRIVERS / MATERIAL CHANGES AND TRANSITIONS          72
4.3.1 GENERAL TREND LAST DECADE GOING FROM PVD & LPCVD TO PECVD    73
4.3.2 MARKET TRENDS BY DEVICE TYPE AND NODE – ADVANCED DEVICES         74
4.3.3 MARKET TRENDS– ADVANCED LOGIC                      75
4.3.4 MARKET TRENDS– WAFER STARTS DRAM                      79
4.3.5 MARKET TRENDS– WAFER STARTS NAND                      81
4.3.6  DEPOSITION PROCESS BY DEVICE TYPE AND MATERIAL– AN OVERVIEW      84
4.3.7  ETCH PROCESS BY DEVICE TYPE– ATOMIC LAYER ETCHING ALE         86
4.3.8 SUMMARY OF TECHNICAL TRENDS AND OPPORTUNITIES             92
4.4 REGIONAL TRENDS                               93
4.4.1 REGIONAL TRENDS – LINDE                           94
4.4.2 REGIONAL TRENDS– AIR LIQUIDE                      95
4.4.3 REGIONAL TRENDS– AIR PRODUCTS                      96
4.4.5 REGIONAL TRENDS– TAIYO NIPPON SANO                  97
4.4.6 REGIONAL TRENDS– KOREA                           98
4.4.7 REGIONAL TRENDS– JAPAN                           99
4.4.8 REGIONAL TRENDS– JAPAN & KOREA                     100
4.3.15 REGIONAL TRENDS– CHINA                            101
4.4.9 REGIONAL TRENDS – RUSSIA                           102
4.4.10 REGIONAL TRENDS– USA                           103
4.5 GENERAL COMMENTS ON SPECIFICATIONS AND PURITY               106
4.6 ELECTRONIC GAS SUPPLY CHAIN RISK FACTORS                   107
4.6.1 GEOPOLITICAL RISKS                          108
4.6.2 RUSSIA RISKS                               109
4.6.3 SUPPLY CHAIN RISKS– RAW MATERIAL PRICING                   110
4.6.4 LOGISTICS                                    111
4.7 MARKET TRENDS ASSESSMENT                            112
5 EHS AND SUSTAINABILITY ISSUES  113
5.1 EHS AND LOGISTIC ISSUES– GREEN HOUSE GASES FROM SEMICONDUCTOR PRODUCTION 114
5.1.2 EHS AND LOGISTIC ISSUES– GREEN HOUSE GASES FROM SEMICONDUCTOR PRODUCTION, CONTINUED    115
5.2 EHS AND LOGISTICS ISSUES                         116
5.3 EHS AND LOGISTIC ISSUE – GREEN HOUSE GASES FROM SEMICONDUCTOR PRODUCTION 117
5.4 EHS AND LOGISTIC ISSUES– GREEN HOUSE GASES FROM AIR GASES (NEON)    118
5.4.1 ASU ENERGY CONSUMPTION - GHG EMISSIONS                119
5.4.2  ASU ENERGY CONSUMPTION - GHG EMISSIONS                120
5.4.3 CARBON FOOTPRINT OF SHIFTING NEON SUPPLY FROM UKRAINE TO CHINA    121
5.4.4 CARBON FOOTPRINT OF NEON PRODUCTION                122
5.4.5 CARBON FOOTPRINT OF NEON SHIPPING IN GAS ISO CONTAINER        123
5.4.6  DRAFT CALCULATION TRANSPORT: CHINA VS UKRAINE            124
5.5 SUSTAINABLE SEMICONDUCTOR PROCESSES AND MANUFACTURING TECHNOLOGIES 125
5.6 HELIUM – SUSTAINABLE PRODUCTION – GREEN HELIUM             126
5.7 HELIUM – SUSTAINABLE PRODUCTION – GREEN HELIUM             127
5.8  NF3 REPLACEMENT: F2 GAS                         128
5.8.1 FLUORINATED GAS REGULATIONS                    129
5.8.2 FLUORINATED GAS REGULATIONS, CONTINUED                130
5.8.3 LINDE F-GAS INSTALLATION                        131
5.8.4 ENVIRONMENT REGULATION RISK– IMPLEMENTED TREATIES AND PROTOCOLS    132
6 ELECTRONIC GASES MARKET STATISTICS & FORECASTS  133
6.1 ELECTRONIC GAS MARKET– HISTORICAL AND 5-YEAR FORECAST         134
6.1.1 INDUSTRIAL GAS MARKET                         135
6.1.2 ELECTRONIC GAS MA                            136
6.1.3 SUPPLIER LIST, FINANCIALS AND PROFILES                137
6.1.4 MARKET DRIVERS FOR THE SPECIALTY GAS MARKET            138
6.2 SPECIALTY GAS MARKET: 5-YEAR SUPPLY & DEMAND RKET SHARE        139
6.2.1 HE 5-YEAR SUPPLY & DEMAND                        140    
6.2.1 HE 5-YEAR SUPPLY & DEMAND, CONTINUED                141
6.2.2 NE 5-YEAR SUPPLY & DEMAND                        142
6.2.3 NEON                                143
6.2.4 XE 5-YEAR SUPPLY & DEMAND                        144
6.2.5 NF3 5-YEAR SUPPLY & DEMAND                    146
6.2.6 TUNGSTEN HEXAFLUORIDE 5-YEAR SUPPLY & DEMAND            147
6.3 M&A ACTIVITIES                             148
6.4 NEW PLANTS                                 149
6.4.1 NEW PLANTS, LINDE EXPANSIONS 2023                    152
6.4.2 NEW PLANTS, AIR LIQUIDE EXPANSIONS 2022/2023            153
6.4.3 NIHON SUO HOLDING CO., LTD. TO INCREASE DIBORANE CAPACITY    154
6.5 SUPPLIER PLANT CLOSURES                         155
6.5.1 NEW ENTRANTS– SK MATERIALS, SHOWA DENKO SEEK JOINT ENTRY INTO US SEMICONDUCTOR GAS MARKET156
6.5.2 NEW ENTRANTS– RESONAC                        157
6.5.3 NEW ENTRANTS– NEON, CHINA                        158
6.6 PRICING TRENDS                             159
6.7 GAS SUPPLY ASSESSMENT                         160
7  SUB TIER MATERIAL SUPPLY CHAIN  161
7.1  SALES CHANNELS                             162
7.2  LOGISTICS REQUIREMENTS                          163
7.2.1 SUB-TIER SUPPLY-CHAIN: TUNGSTEN DISRUPTIONS            164
7.3 SUB-TIER SUPPLY-CHAIN M&A ACTIVITY                     166
7.4 SUB-TIER SUPPLY-CHAIN EHS AND LOGISTICS ISSUES             167
7.5 SUB-TIER SUPPLY-CHAIN PRICING TRENDS                 168
7.6 SUB-TIER SUPPLY-CHAIN TECHCET ANALYST ASSESSMENT             169
8  SUPPLIER PROFILES  170
ADEKA CORPORATION
AIR LIQUIDE
AZMAX CO., LTD
DNF CO., LTD
ENTEGRIS
...and 20+ more
9  APPENDIX
9.1 GASES USED BY MULTIPLE INDUSTRIES                     288
9.1.1 SPECIALTY GAS INDUSTRY MATRIX                    289
9.1.2 GASES USED FOR SEMICONDUCTOR DEVICE MANUFACTURING            290
9.1.3 GASES USED IN THE DISPLAY INDUSTRY                291
9.2 SUPPLIER LISTING BY GAS TYPE                     294
9.2.1 HYDRIDES                                295
9.2.2 SILICON PRECURSORS (SILANES)                    296
9.2.3 ETCHANTS/CHAMBER CLEAN                        297
9.2.4 DEPOSITION/MISC                            298
9.2.5 BULK GASES                            299
9.3 ETCH GAS ROADMAPS                             300
9.3.1 ETCH ROADMAPS 1 OF 3                         301
9.3.2 ETCH ROADMAPS 2 OF 3                         302
9.3.3 ETCH ROADMAPS 3 OF 3                         303

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List of Tables/Graphs

LIST OF FIGURES

FIGURE 1: ELECTRONIC GAS MARKET                        14
FIGURE 2: ELECTRONIC GAS MARKET SEGMENTATION                15
FIGURE 3:  TECHCET WAFER START FORECAST BY NODE                17
FIGURE 4: TECHNOLOGY ROADMAP DEVICES                    21
FIGURE 5: TOTAL ELECTRONIC GAS MARKET SHARE 2021, US$6,3 BILLION    23
FIGURE 6: AIR GAS BOILING POINT                        25
FIGURE 7: COMPARISON OF CO2 EMISSIONS FROM VARIOUS TRANSPORTATION MODES    26
FIGURE 8: OCEAN CONTAINER PRICE INDEX - JULY ‘20 TO MARCH ‘23     27
FIGURE 9: GLOBAL ECONOMY AND THE ELECTRONICS SUPPLY CHAIN (2022)    38
FIGURE 10: WORLDWIDE SEMICONDUCTOR SALES                 39
FIGURE 11: TECHCET’S TAIWAN SEMICONDUCTOR INDUSTRY INDEX (TTSI)*    40
FIGURE 12: 2023 SEMICONDUCTOR INDUSTRY REVENUE GROWTH FORECASTS    41
FIGURE 13: 2022 SEMICONDUCTOR CHIP APPLICATIONS                42
FIGURE 14: MOBILE PHONE SHIPMENTS WW ESTIMATES                 43
FIGURE 15: WORLDWIDE PC AND TABLET FORECAST                44
FIGURE 16: ELECTRIFICATION TREND BY WORLD REGION             45
FIGURE 17: SEMICONDUCTOR AUTOMOTIVE PRODUCTION                46
FIGURE 18: TSMC PHOENIX INVESTMENT ESTIMATED WILL BE US $40 B        48
FIGURE 19: CHIP EXPANSIONS 2022-2027 US$366 B                49
FIGURE 20: SEMICONDUCTOR CHIP MANUFACTURING REGIONS OF THE WORLD    51
FIGURE 21: GLOBAL TOTAL EQUIPMENT SPENDING BY SEGMENT (US$ B)        52
FIGURE 22: OVERVIEW OF ADVANCED LOGIC DEVICE TECHNOLOGY ROADMAP    53
FIGURE 23: INTEL OHIO PLANT SITE FEB. 2023 AND ARTIST RENDERING (ON BOTTOM)54
FIGURE 24: EUROPE CHIP EXPANSION UPSIDE                    57
FIGURE 25: PORT OF LA                            58
FIGURE 26:  TECHCET WAFER START FORECAST BY NODE SEGMENTS**        59
FIGURE 27:  GLOBAL SEMICONDUCTOR MATERIALS OUTLOOK            60
FIGURE 28: 2D PHASE OF BORON AS POSSIBLE FUTURE TRANSISTOR CHANNEL    66
FIGURE 29: 3DNAND MARKET SHARE 2022                    67
FIGURE 30: 3DNAND STRUCTURE                        68
FIGURE 31: MO PRECURSORS                        69
FIGURE 32: PATENT FAMILIES FILED FOR MOLYBDENUM ALD IN THE MEMORY SPACE    70
FIGURE 33:WAFER START FORECAST SHOWING TWO TIMINGSCENARIOS WHERE MO COULD BE INTRODUCED (MILLIONS OF 200 MM EQUIVALENT / YEAR)71
FIGURE 34: 3D DEVICE ARCHITECTURES                    73
FIGURE 35: FORECASTS – WAFER STARTS 2021 TO 2027             74
FIGURE 36: FORECASTS – WAFER STARTS LOGIC 300 MM             75
FIGURE 37: SAMSUNG START 3 NM PILOT RAMP USING GAA-FET TECHNOLOGY JUNE 2022 76
FIGURE 38: IMEC 2022 LOGIC ROADMAP                    77
FIGURE 39: APPLIED MATERIALS CENTURA PATTERN SHAPING CLUSTER        78
FIGURE 40: FORECASTS – WAFER STARTS DRAM 300 MM                79
FIGURE 41: IP FILING IN THE FIELD OF 3DRAM IS ACCELERATING        80
FIGURE 42: FORECASTS – WAFER STARTS NAND 300 MM                81
FIGURE 43:  PATHWAYS FOR CONTINUED 3D NAND SCALING            82
FIGURE 44: 3DNAND SCALING FROM 1 STACK TO 4 STACKS            83
FIGURE 45: SELECTIVE W LOWERS RESISTANCE                85
FIGURE 46: FINFET/GAA TRANSITION                    86
FIGURE 47: SELECTIVITY IMPROVEMENT WITH ALE                 87
FIGURE 48: ALD AND ALE ROADMAPS OF INTEL, TSMC AND SAMSUNG        88
FIGURE 49: DEP - ALE STI FILL AND RECESS ETCH                90
FIGURE 50: PLASMA AND THERMAL ALE PROCESSES                91
FIGURE 51: AIR LIQUIDE FINANCIALS (ANNUAL REPORT 2022 PENDING)        95
FIGURE 52: KOREA 2021 NEON IMPORTS                    98
FIGURE 53: RESONAC BUSINESS SEGMENT REVENUE 2022            99
FIGURE 54: TOTAL HELIUM PRODUCTION 160 MILLION M3            102
FIGURE 55: FLUORSPAR PRICE IN US 2014-2022                110
FIGURE 56: OCEAN CONTAINER PRICE INDEX - JULY ‘20 TO MARCH ‘23     111
FIGURE 57: CO2 EMISSIONS CONTRIBUTIONS WITHIN A CHIP FAB        114
FIGURE 58:  GLOBAL WARMING IMPACT FROM VARIOUS PROCESS GASES       115
FIGURE 59: TOTAL EMISSIONS AND ENERGY USE PROJECTION PER LOGIC NODE    116
FIGURE 60: CO2EQ OUTPUT FROM ETCH GASES                 117
FIGURE 61: AIR SEPARATION UNIT FLOW CHART                118
FIGURE 62: AIR GAS BOILING POINT                    119
FIGURE 63: CARBON GENERATION FROM AIR SEPARATION PROCESSES         120
FIGURE 64: COMPARISON OF CO2 EMISSIONS FROM VARIOUS TRANSPORTATION MODES 123
FIGURE 65: F2 AND NF3 ACTIVATION                    128
FIGURE 66: ELECTRONIC GAS MARKET                    134
FIGURE 67: TOTAL INDUSTRIAL GAS MARKET 2021, US$97 BILLION        135
FIGURE 68: TOTAL ELECTRONIC GAS MARKET 2021, US$6,3 BILLION        136
FIGURE 69: ELECTRONIC GAS MARKET SEGMENTATION                138
FIGURE 70: HE WW SUPPLY AND DEMAND                    140
FIGURE 71: 2027 HELIUM SUPPLY                        141
FIGURE 72: TOTAL NEON DEMAND VS. SUPPLY                    142
FIGURE 73: KOREA 2021 NEON IMPORTS                    143
FIGURE 74: TOTAL XENON DEMAND VS. SUPPLY (MILLION LITERS/YR)        144
FIGURE 75: TOTAL KRYPTON DEMAND VS. SUPPLY (MILLION LITERS/YR)        145
FIGURE 76: NF3  SUPPLY/DEMAND                        146
FIGURE 77: AWF6 FORECAST                        147
FIGURE 78: HARDMASK SCHEMATIC                        154
FIGURE 79: LATEST SITUATION MAP IN UKRAINE, SHOWING TAKEN MAURIUPOL BUT ODESSA STILL FREE 155
FIGURE 80: RESONAC BUSINESS SEGMENT REVENUE 2022            157
FIGURE 81: RARE GAS PRICE ESCALATION                    159
FIGURE 65: F2 AND NF3 ACTIVATION                    128
FIGURE 66: ELECTRONIC GAS MARKET                    134
FIGURE 67: TOTAL INDUSTRIAL GAS MARKET 2021, US$97 BILLION        135
FIGURE 68: TOTAL ELECTRONIC GAS MARKET 2021, US$6,3 BILLION        136
FIGURE 69: ELECTRONIC GAS MARKET SEGMENTATION                138
FIGURE 70: HE WW SUPPLY AND DEMAND                    140
FIGURE 71: 2027 HELIUM SUPPLY                        141
FIGURE 72: TOTAL NEON DEMAND VS. SUPPLY                    142
FIGURE 73: KOREA 2021 NEON IMPORTS                    143
FIGURE 74: TOTAL XENON DEMAND VS. SUPPLY (MILLION LITERS/YR)        144
FIGURE 75: TOTAL KRYPTON DEMAND VS. SUPPLY (MILLION LITERS/YR)        145
FIGURE 76: NF3  SUPPLY/DEMAND                        146
FIGURE 77: AWF6 FORECAST                        147
FIGURE 78: HARDMASK SCHEMATIC                        154
FIGURE 79: LATEST SITUATION MAP IN UKRAINE, SHOWING TAKEN MAURIUPOL BUT ODESSA STILL FREE 155
FIGURE 80: RESONAC BUSINESS SEGMENT REVENUE 2022            157
FIGURE 81: RARE GAS PRICE ESCALATION                    159
FIGURE 82: HE MATERIALS SUPPLIER TIER STRUCTURE             162
FIGURE 83: TUNGSTEN USE BY INDUSTRY (TECHCET ESTIMATE)            165
FIGURE 84: ELECTRONIC SPECIALTY GASES                    177
FIGURE 85: BULK GASES                            177

LIST OF TABLES

TABLE 1: SPECIALTY AND BULK GAS REVENUE 2022, 2027            14
TABLE 2: ELECTRONIC GAS MARKET GROWTH RATES BY END MARKET        15
TABLE 3: 5-YEAR SPECIALTY GAS SUPPLY & DEMAND                16
TABLE 4: GAS TRENDS AND OPPORTUNITIES BY DEVICE TYPE & PROCESS TECHNOLOGY 22
TABLE 5: GLOBAL GDP AND SEMICONDUCTOR REVENUES*                36
TABLE 6: IMF ECONOMIC OUTLOOK*                         37
TABLE 7: DATA CENTER SYSTEMS AND COMMUNICATION SERVICES MARKET SPENDING 2022    47
TABLE 8: OVERVIEW OF DEPOSITION PROCESSES BY DEVICE TYPE AND MATERIAL    84
TABLE 9: ETCH GASES SUMMARY TABLE                    91
TABLE 10: GAS TRENDS AND OPPORTUNITIES BY DEVICE TYPE            92
TABLE 11: LINDE FINANCIALS AND REGIONAL SALES                94
TABLE 12: AIR PRODUCTS REGIONAL FINANCIALS                96
TABLE 13: TAIYO NIPPON SANSO REGIONAL FINANCIALS            97
TABLE 14: ESTIMATED SUPPLY CHAIN SUPPLIER RANKING            104
TABLE 15: REGIONAL SUMMARY OF GAS MARKET                105
TABLE 16: CO2 EMISSIONS PER TONS SHIPPED BY OCEAN, TRUCK OR RAIL    124
TABLE 17: GAS GWP AND ATMOSPHERIC LIFETIME                128
TABLE 18: ELECTRONIC GAS MARKET SIZE AND GROWTH                134
TABLE 19: TOTAL REVENUE 2022 COMPARED TO 2021 OF MAJOR GAS COMPANIES AND GAS SUPPLIERS    137
TABLE 20: ELECTRONIC GAS MARKET GROWTH RATES BY END MARKET        138
TABLE 21: 5-YEAR SPECIALTY GAS SUPPLY & DEMAND                139
TABLE 22: M&A ACTIVITIES                        148
TABLE 23: SPECIALTY GAS INDUSTRY MATRIX                    173
TABLE 24: GASES USED IN FPD MANUFACTURING                 176
TABLE 25: HYDRIDE GAS SUPPLIERS                        179
TABLE 26: SILICON PRECURSOR SUPPLIERS                    180
TABLE 27: ETCHANT GAS SUPPLIERS                        181
TABLE 28: DEPOSITION/MISC. GAS SUPPLIERS                182
TABLE 29: BULK GAS SUPPLIERS                        183
TABLE 30: ETCH ROADMAPS                            185
TABLE 31: ETCH ROADMAPS                            186
TABLE 32: ETCH ROADMAPS                            187

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